| 周扬,王晓峰.基于氧化钌微电极的MEMS微型超级电容器的设计与制作[J].高技术通讯(中文),2012,22(4):436~440 |
| 基于氧化钌微电极的MEMS微型超级电容器的设计与制作 |
| Design and fabrication of a RuO2 microelectrode based micro supercapacitor |
| 修订日期：2010-09-21 |
| DOI： |
| 中文关键词: 微电子机械系统（MEMS）， 微型超级电容器， RuO2， 碳纳米管， 复合功能薄膜 |
| 英文关键词: micro electro mechanical systems （MEMS）, micro supercapacitor, RuO2, carbon nanotubes, functional nanocomposite films |
| 基金项目:国家自然科学基金（50905096）资助项目 |
| 作者 | 单位 | | 周扬 | 精密测试技术与仪器国家重点实验室 | | 王晓峰 | 清华大学精密仪器与机械学系 |
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| 全文下载次数: 2001 |
| 中文摘要: |
| 基于感应耦合等离子刻蚀等工艺设计制作了一种具有双腔室结构的微型氧化钌超级电容器，在其腔室微结构中基于电化学沉积方法制备了氧化钌微电极功能薄膜。直流充放电测试结果表明，该微型超级电容器的比容量达到0.012F·cm-2，储能密度达到0.006J·cm-2。进行了氧化钌/碳纳米管复合功能，薄膜微电极的性能研究，阻抗谱测试与伏安测试曲线表明，与氧化钌微电极功能薄膜相比，氧化钌/碳纳米管复合功能薄膜阻抗显著降低，容量明显提高，基于该复合功能薄膜的微型超级电容器的储能密度等关键性能指标可得到显著提高。 |
| 英文摘要: |
| A RuO2 micro supercapacitor with a side by side electrode configuration structure was designed and fabricated. It was composed of the micro structure, the micro electrode, and the functional RuO2 film on the electrode. The micro structure was made by the MEMS technology, while the micro electrode was made by electroplating the functional RuO2 film on the surface of the current collector. The electrochemical test results showed that the micro supercapacitor had the specific capacity of 0.012F·cm-2 and the energy density of 0.006J·cm-2. The performance of the RuO2 CNT (carbon nanotube) composite functional film was studied. The cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS) curves showed that compared with the RuO2 film, the RuO2 CNT composite film greatly decreased the internal resistance, and improved the energy storage density and the charge CNT discharge quality of the micro capacitor. Anyway, the micro capacitor can satisfy the energy requirements of a lot of microsystems for its great stability and discharge power. |
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