| Dong Linxi(董林玺),Li Yongjie,Yan Haixia,Sun Lingling.[J].高技术通讯(英文),2011,17(2):207~213 |
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| Effects of electric field fringe on performances of grid strip capacitive MEMS devices |
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| DOI： |
| 中文关键词: |
| 英文关键词: micro-electro-mechanical system (MEMS), capacitive sensor, capacitor fringe effect, grid strip sensing capacitor, MEMS noise |
| 基金项目: |
| Author Name | Affiliation | | Dong Linxi(董林玺) | | | Li Yongjie | | | Yan Haixia | | | Sun Lingling | |
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| 中文摘要: |
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| 英文摘要: |
| Sensing structure of grid strip capacitors can be used in the design of capacitive micro-electro-mechanical system (MEMS) resonators, accelerometers etc. A grid strip structure consists of non-entirely overlap plates so that the capacitor fringe effect cannot be neglected in the design. Electric-magnetic Finite Element Method (FEM) software ANSOFT-Maxwell is employed to analyze the fringe effect of a grid strip capacitor. The analysis includes capacitance changes with change of overlap length, overlap width, plate thickness, grid strip density etc. The results show that fringe effect leads to non-linear change of grid strip capacitance with the change of overlap length and width, that the capacitance increases with the increase of grid strip width and plate thickness, and that sensitivity can be improved through the increase of grid strip density in the condition of identical total overlap area, but linearity is reduced. |
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