| Zhou Binghai (周炳海),Zhong Zhenyi.[J].高技术通讯(英文),2016,22(1):47~54 |
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| An effective estimation of distribution algorithm for parallel litho machine scheduling with reticle constraints |
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| DOI：10.3772/j.issn.1006-6748.2016.01.007 |
| 中文关键词: |
| 英文关键词: semiconductor manufacturing, parallel machine scheduling, auxiliary resource constraints, estimation of distribution algorithm |
| 基金项目: |
| Author Name | Affiliation | | Zhou Binghai (周炳海) | | | Zhong Zhenyi | |
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| 中文摘要: |
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| 英文摘要: |
| In order to improve the scheduling efficiency of photolithography, bottleneck process of wafer fabrications in the semiconductor industry, an effective estimation of distribution algorithm is proposed for scheduling problems of parallel litho machines with reticle constraints, where multiple reticles are available for each reticle type. First, the scheduling problem domain of parallel litho machines is described with reticle constraints and mathematical programming formulations are put forward with the objective of minimizing total weighted completion time. Second, estimation of distribution algorithm is developed with a decoding scheme specially designed to deal with the reticle constraints. Third, an insert-based local search with the first move strategy is introduced to enhance the local exploitation ability of the algorithm. Finally, simulation experiments and analysis demonstrate the effectiveness of the proposed algorithm. |
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